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dissolution
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1.
Swelling of Poly(methyl methacrylate) Films in Different Solvent Vapor Environments: A Comparison of Solvents Used in Nanolithographic Processing
Student Name:
Rohrbach, Alan
Date Uploaded:
04/08/2019
Research Field:
Engineering, Materials Science, Chemistry, Polymer, and Physics, Condensed Matter
Department:
Physics
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Year
Spring 2019
1
School
Emory College
1
Department
Physics
1
Degree
B.S.
1
Submission Type
Honors Thesis
1
Research Field
Chemistry, Polymer
1
Engineering, Materials Science
1
Physics, Condensed Matter
1
Committee
Connie B. Roth, Emory University
1
David Zureick-Brown, Emory University
1
Eric R. Weeks, Emory University
1
Keyword
dissolution
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electron beam lithography
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ellipsometry
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polymers
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resists
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